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3. Cost-Effective Laboratory Matrix Projection Micro-Lithography System.

Author

Galiullin, Arslan A., Pugachev, Mikhail V., Duleba, Aliaksandr I., and Kuntsevich, Aleksandr Yu.

Subjects
RED light, MICROLITHOGRAPHY, QUANTUM optics, FOCAL length, BLUE light, PROJECTORS, MICROSCOPES
Abstract

This paper presents a home-built projection lithographer designed to transfer the image from a DLP (digital light processing) projector MEMS matrix onto the microscope objective's field of view, where a photoresist-covered substrate is placed. The photoresist is exposed using blue light with a wavelength of 450 nm. To calibrate the device and adjust focal lengths, we utilize a red light that does not affect the photoresist. The substrate is located on a movable platform, allowing the exposure field to be shifted, enabling the exposure of designs with lateral sizes of 1 × 1 cm 2 at a resolution of a few micrometers. Our setup showcases a 2 μ m resolution for the single frame 200 × 100 μ m 2 , and a 5 μ m resolution for 1 × 1 cm 2 with field stitching. The exposure speed, approximately 1 mm 2 /100 s, proves to be sufficient for a variety of laboratory prototyping needs. This system offers a significant advantage due to its utilization of easily accessible and budget-friendly components, thereby enhancing its accessibility for a broader user base. The exposure speed and resolution meet the requirements for laboratory prototyping in the fields of 2D materials, quantum optics, superconducting microelectronics, microfluidics, and biology. [ABSTRACT FROM AUTHOR]

Published
2024
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7. Novel Bis-Ammonium Salts of Pyridoxine: Synthesis and Antimicrobial Properties

Author

Shtyrlin, Nikita V., primary, Pugachev, Mikhail V., additional, Sapozhnikov, Sergey V., additional, Garipov, Marsel R., additional, Vafina, Rusalia M., additional, Grishaev, Denis Y., additional, Pavelyev, Roman S., additional, Kazakova, Renata R., additional, Agafonova, Mariya N., additional, Iksanova, Alfiya G., additional, Lisovskaya, Svetlana A., additional, Zeldi, Marina I., additional, Krylova, Elena S., additional, Nikitina, Elena V., additional, Sabirova, Alina E., additional, Kayumov, Airat R., additional, and Shtyrlin, Yurii G., additional

Published
2020
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