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In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is suspended by four springs. The applied acceleration tends to move the PM from its resting position. This mechanical displacement can be measured by the FP interferometer formed between the proof mass cross-section and the optical fiber end face. The proposed sensor is fabricated on a silicon on insulator (SOI) wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of 1g. Also, the optical sensitivity and resolution of the sensor in the static characterization are 6.52 nm/g and 153ug. The sensor sensitivity in the power measurement is 49.6 mV/g and its resonant is at 1372 Hz. Using the differential measurement method increases the sensitivity of the accelerometer. Based on experimental data, the sensor sensitivity is two times as high as that of a similar MOEMS accelerometer with one FP cavity., Comment: arXiv admin note: text overlap with arXiv:2202.05153

In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-P\'erot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the cross-section of a proof mass (PM) which is suspended by four U-shaped springs. The applied acceleration tends to move the PM in the opposite direction. The arrays of fixed and movable comb fingers produce an electrostatic force which keeps the PM in its resting position. The voltage that can provide this electrostatic force is considered as the output of the sensor. Using a closed-loop detection method it is possible to increase the measurement range without losing the resolution. The proposed sensor is fabricated on a silicon-on-insulator wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of 5 g. In the closed-loop mode, the sensitivity and bias instability of the sensor are 1.16 V/g and 40 g, respectively.

A novel method for increasing the extinction ratio of plasmonic waveguide polarizer has been investigated in this work. Aluminum was coated in a 20 microns multi-strips pattern on the top of a SU-8 waveguide to excite the surface plasmons. Simulation and experimental results have been shown the extinction ratio of the multi-strip polarizer is more than the single strip ones with the same total aluminum-coated length due to the coupling loss between Al coated and uncoated region and also the scattering at the edge of metal. This polarizer was characterized over a wide range of wavelengths and showed a high extinction ratio of 46 dB at 1550 nm and 26.8 dB at 980 nm wavelengths.