1. Wafer-Scale Integration of Freestanding Photonic Devices with Color Centers in Silicon Carbide
- Author
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Majety, Sridhar, Norman, Victoria A., Saha, Pranta, Rubin, Alex H., Dhuey, Scott, and Radulaski, Marina
- Subjects
Physics - Optics ,Physics - Applied Physics - Abstract
Color center platforms have been at the forefront of quantum nanophotonics for applications in quantum networking, computing, and sensing. However, large-scale deployment of this technology has been stifled by a lack of ability to integrate photonic devices at scale while maintaining the properties of quantum emitters. We address this challenge in silicon carbide which has both commercially available wafer-scale substrates and is a host to color centers with desirable optical and spin properties. Using ion beam etching at an angle, we develop a 5-inch wafer process for the fabrication of triangular cross-section photonic devices in bulk 4H-SiC. The developed process has a variability in etch rate and etch angle of 5.4% and 2.9%, respectively. Furthermore, the integrated color centers maintain their optical properties after the etch, thus achieving the nanofabrication goal of wafer-scale nanofabrication in quantum-grade silicon carbide.
- Published
- 2024