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Mie-resonant dielectric metasurfaces are excellent candidates for both fundamental studies related to light-matter interactions and for numerous applications ranging from holography to sensing to nonlinear optics. To date, however, most applications using Mie metasurfaces utilize only weak light-matter interaction. Here, we go beyond the weak coupling regime and demonstrate for the first time strong polaritonic coupling between Mie photonic modes and intersubband (ISB) transitions in semiconductor heterostructures. Furthermore, along with demonstrating ISB polaritons with Rabi splitting as large as 10%, we also demonstrate the ability to tailor the strength of strong coupling by engineering either the semiconductor heterostructure or the photonic mode of the resonators. Unlike previous plasmonic-based works, our new all-dielectric metasurface approach to generate ISB polaritons is free from ohmic losses and has high optical damage thresholds, thereby making it ideal for creating novel and compact mid-infrared light sources based on nonlinear optics.

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We experimentally demonstrate a metasurface that supports tailorable polaritons arising from strong coupling between Mie modes of dielectric nanoresonators and intersubband transitions of semiconductor quantum wells that are embedded inside the resonator.

We demonstrate an extremely nonlinear all-dielectric metasurface that employs intersubband polaritons to achieve a second-harmonic conversion coefficient of 3 mW/W2, and second-harmonic power conversion efficiency of 0.045% at a modest pump intensity of 6.7 kW/cm2.

Highly nonlinear optical materials with fast third-order nonlinear optical response are crucial for the operation of all-optical photonic devices, such as switches for signal processing and computation, power limiters, and saturable absorbers. The nonlinear response of traditional optical materials is weak, thus requiring large light intensities to induce significant changes in their properties. Here we show that optical control of the coupling rate in subwavelength patch antennas coupled to intersubband transitions in multi-quantum-well semiconductor heterostructures can provide a giant third-order nonlinear response, on the order of 3.4 × 10 − 13 m 2 / V 2 , with a response time < 2 p s . We utilize this effect to realize intersubband polaritonic metasurfaces and demonstrate their operation as highly nonlinear saturable and reverse saturable absorbers, enabling optical power limiters and other elements for all-optical modulation and control. Our approach enables a plethora of compact, low-power, highly nonlinear devices with spectral, temporal, and structured wavefront responses tailored by design.

The Si-compatibility of perovskite heterostructures offers the intriguing possibility of producing oxide-based quantum well (QW) optoelectronic devices for use in Si photonics. While the SrTiO3/LaAlO3 (STO/LAO) system has been studied extensively in the hopes of using the interfacial 2-dimensional electron gas in Si-integrated electronics, the potential to exploit its giant 2.4 eV conduction band offset in oxide-based QW optoelectronic devices has so far been largely ignored. Here, we demonstrate room-temperature intersubband absorption in STO/LAO QW heterostructures at energies on the order of hundreds of meV, including at energies approaching the critically important telecom wavelength of 1.55 μm. We demonstrate the ability to control the absorption energy by changing the width of the STO well layers by a single unit cell and present theory showing good agreement with experiment. A detailed structural and chemical analysis of the samples via scanning transmission electron microscopy (STEM) and electron energy loss spectroscopy (EELS) is presented. This work represents an important proof-of-concept for the use of transition metal oxide QWs in Si-compatible optoelectronic devices.

We experimentally demonstrate a novel approach of using coupling between a leaky mode resonance and intersubband transitions in semiconductor quantum wells to realize a hybrid dielectric-semiconductor metasurface with high second-harmonic conversion efficiency and increased bandwidth.

The application of the Pancharatnam-Berry (PB) phase approach to the design of nonlinear metasurfaces has recently enabled subdiffractive phase control over the generated nonlinear fields, embedding phased array features in ultrathin structures. Here, we rigorously model, analyze, and design highly efficient nonlinear metasurfaces with advanced functionalities, including the generation of pencil beams steered in arbitrary directions in space, as well as vortex beams with polarization-dependent angular momentum, and we extend the PB approach to various nonlinear processes. To this purpose, we develop an accurate and efficient theoretical framework---inspired by the linear phase array theory---based on the effective nonlinear susceptibility method, thus avoiding the use of time-consuming numerical simulations. Our findings allow exploiting the flat nonlinear optics paradigm, enabling exciting applications based on subwavelength field control over flat and large-scale structures with giant nonlinear responses.

We apply the Pancharatnam-Berry phase approach to plasmonic metasurfaces loaded by highly nonlinear multiquantum-well substrates, establishing a platform to control the nonlinear wave front at will based on giant localized nonlinear effects. We apply this approach to design flat nonlinear metasurfaces for efficient second-harmonic radiation, including beam steering, focusing, and polarization manipulation. Our findings open a new direction for nonlinear optics, in which phase matching issues are relaxed, and an unprecedented level of local wave front control is achieved over thin devices with giant nonlinear responses.

Gradient metasurfaces have recently been demonstrated to provide control of the phase of scattered fields over subwavelength scales, enabling a broad range of linear optical components in a flat, ultrathin, integrable platform. Additionally, the development of nonlinearmetasurfaces has disrupted conventional nonlinear optical device design by relaxing phase matching constraints, reducing size and dimensionality, and providing record values of localized nonlinear responses. However, extending the “flat optics” paradigm to the nonlinear case faces important challenges, since we are required to simultaneously achieve efficient frequency conversion and sub-diffractive phase control. Here, we experimentally demonstrate continuous phase control of the giant nonlinear second harmonic optical response from metasurfaces tied to intersubband transitions in semiconductor multi-quantum wells, establishing an exciting path toward realizing the vision of flat, nonlinear optics.