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In micro-/nano-scale, multi-material three-dimensional (3D), structuring has been a major research area for making various applications. To overcome dimensional and material limitations, several hybrid processes have been proposed. The hybrid processes were performed in the same or different numerically controlled stages. If the stages differed, the substrate was moved and locked to the stage before fabrication. During the locking, alignment error occurred. This error became problematic because this significantly compromised the quality of final structures. Here, an alignment method for a hybrid process consisted of a focused ion beam milling, aerodynamically focused nanoparticle printing, and micro-machining was developed. Two sets of collinear marks were placed at the edges of the substrate. Rotational and translational errors were calculated and compensated using the marks. Processes having different scales were bridged through this alignment method. Various materials were utilized, and accuracy was less than 50 nm when the length of the substrate was less than 13 mm. The alignment method was employed to fabricate a V-shaped structure and step-shaped structure using polymer, ceramic, and metal.

In this paper, a total of 57 micro and nano scale hybrid manufacturing processes are reviewed. These processes are categorized in terms of process timing and process type. Process timing is one of the most important aspects of manufacturing, and three different process schemes — concurrent, main/assistive (M/S) separate, and main/main (M/M) separate — are considered. The process type is categorized as either geometrically additive or subtractive, and all hybrid processes are categorized into combinations of additive, subtractive, and assistive process. Features and advantages are described for each of these classifications. Machining is found to be the most common process for both micro and nano-scale hybrid manufacturing. Of micro scale hybrid manufacturing schemes, 74.4% use assistive processes as a secondary process because the main purpose of most micro scale hybrid manufacturing is to improve the quality of the process. In nano scale manufacturing, 61.5% of hybrid manufacturing schemes employ assistive processes, since these processes typically focus on the fabrication of parts that are difficult to fabricate using a single, existing process. Based on a summary of published work, future trends in hybrid manufacturing at the micro and nano scale are suggested.

A hybrid 3D printing process was developed for multiple-material/freeform nano-scale manufacturing. The process consisted of aerodynamically focused nanoparticle (AFN) printing, micro-machining, focused ion beam milling, and spin-coating. Theoretical and experimental investigations were carried out to improve the compatibility of each of the processes, enabling bridging of various different techniques. The resulting hybrid process could address the limitations of individual processes, enabling improved process scaling and dimensional degrees of freedom, without losing the advantages of the existing processes. The minimum structure width can be reduced to 50 nm using undercut structures. In addition, AFN printing employs particle impact for adhesion, and various inorganic materials are suitable for printing, including metals and functional ceramics. Using the developed system, we fabricated bi-material cantilevers for applications as a thermal actuator. The mechanical and thermal properties of the structure were investigated using an in situ measurement system, and irregular thermal phenomena due to the fabrication process were analyzed. We expect that this work will lead to improvements in the area of customized nano-scale manufacturing, as well as further improvements in manufacturing technology by combining different fabrication techniques.