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The characteristics of a large-size internal-type inductively coupled plasma (ICP) source having a \double-comb-type" antenna have been investigated for the processing of a large-area at-panel display substrate having a size of 2,300 mm 2,000 mm, and its characteristics were compared with those for an ICP source having a \serpentine-type" antenna. The ICP source with the \double-comb-type" antenna showed a lower impedance, a higher plasma uniformity, and a higher plasma density compared to the ICP source with the \serpentine-type" antenna. The measured plasma density and uniformity of the ICP source with the \double-comb-type" antenna were higher than 8.5 1010/cm3 and lower than 14 %, respectively, at a 10 kW rf power and 15 mTorr of Ar. The etch uniformity of the photoresist within the substrate was about 12.5 % at a 8 kW rf power and 15 mTorr Ar/O2 (7 : 3).

The electrical and the plasma properties of an internal linear inductively coupled plasma (ICP) source with/without a C-shaped Ni-Zn ferromagnetic module installed near the inductive antenna were investigated. The installation of the ferromagnetic module decreased the voltage and the current of the antenna at a given power while the phase angle between the voltage and the current was decreased. Therefore, the load resistance and the power transfer e ciency were increased at the same rf power for the ICP source with the ferromagnetic module. At a rf power of 800 W and 5 mTorr, the installation of the ferromagnetic material increased the plasma density from 2.9 1011/cm3 to 3.5 1011/cm3 while decreasing the plasma potential and the electron temperature slightly.

J Korean Assoc Oral Maxillofac Surg 2011;37:77-80) A calcifying epithelial odontogenic tumor (CEOT) was first described as a separate entity in 1955 by Pindborg, and has since be en referred to as Pindborg tumor. CEOT is characterized by the presence of squamous-cell proliferation, calcification and amyloid deposits, and a ccounts for only 1% of all odontogenic tumors. CEOT is a benign, though occasional locally invasive, slow-growing neoplasm. It is located either in traosseously or extraosseously, and is usually associated with an unerupted permanent tooth. A 24 year-old female visited our clinic, presenting with a palatal swelling and intra-oral ulcer. After an incisional biopsy, t he lesion was confirmed to be odontogenic tumor. A tumor resection and reconstruction surgery with tongue flap were performed.