1. A toroidal inductor integrated in a standard CMOS process
- Author
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Pietro Andreani, Ivan Bietti, Rinaldo Castello, E. Sacchi, Cesare Ghezzi, Luca Vandi, and Enrico Temporiti
- Subjects
Engineering ,Toroid ,business.industry ,Inductor ,Surfaces, Coatings and Films ,Inductance ,Quality (physics) ,CMOS ,Hardware and Architecture ,Electromagnetic coil ,Signal Processing ,Limit (music) ,Range (statistics) ,Electronic engineering ,business - Abstract
This paper presents a toroidal inductor integrated in a standard 0.13 ?m CMOS process. Finite-elements preliminary simulations are provided to prove the validity of the concept. In order to extract fundamental parameters by means of direct calculations, two different and well-known approaches are followed and the results are compared; this comparison provides useful guidelines for the design of the device. A very simple ? model for low frequencies is derived from 1-port and 2-port measurements, and a good matching with general theory is observed. The coil exhibits an inductance between 0.9 nH and 1.1 nH up to 20 GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15 GHz. No self-resonance is observed within the measurement range.
- Published
- 2007
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