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With the slipplng of tbe insertion node for extreme ultraviolet lithography demands on resist resolution have increased further stresslng sensitivity requirements. A variety of resists both chemically amplified and not have beend developed meeting resolution needs but falling short on sensitivity and line-width roughness (LWR). Note that resolution is an absolute mandatory requirement the true tradeoff that must be considered is between sensitivity and LWR. Contact hole printing is a crucial application for extreme ultraviolet lithography and is particularly challenged by resist sensitivity due to inherent in effiencies in darkfield contact printing. Checkerboard strong phase shift mask have the potential to alleviate this problem through a 4x increase in optical efficiency. The feasibility of this method is demonstrated using the SEMATECH Berkeley Microfield Exposure Tool pseudo phase shift mask configuration and preliminary results are provided on the fabrication of an etched multilayer checkerboard phase shift mask.

Carbon contamination is a significant issue with extreme ultraviolet (EUV) masks because it lowers throughput and has potential effects on imaging performance. Current carbon contamination research is primarily focused on the lifetime of the multilayer surfaces, determined by reflectivity loss and reduced throughput in EUV exposure tools. However, contamination on patterned EUV masks can cause additional effects on absorbing features and can affect the printed images. In this work, various carbon contamination experiments were performed to study the impact between contamination topography and observed imaging performance. Lithographic simulation using calculated aerial images and experimentally determined resist parameters was performed and compared to the printing results to estimate the allowed carbon thickness with critical dimension compensation applied to the mask. [ABSTRACT FROM AUTHOR]

Type 316L stainless steel (316L SS), commonly used as pot roll material, was tested in an industrial Zn–Al galvanizing bath, with an effective Al content of 0.2 wt.%. Samples welded to the supporting roll arms and sides of the sink roll experienced heavy dross buildup. Samples placed at locations away from the incoming strip generally experienced much less dross buildup. Dross particles within the buildup on samples attached to supporting roll arms were small in size but numerous while particles on samples welded to the sides of the sink roll were much larger. SEM-EDS analyses indicated that the buildup consisted of two layers. The inner layer was the product of the corrosive reaction of 316L SS with the bath metal, and the outer layer was formed by dross particles built up on the inner reaction layer. The intermetallic phase, which formed at the reaction front of the samples was the inhibition compound Fe2Al5 containing some Mo and Cr. The formation of this intermetallic layer provided a thermodynamically favourable base for the attachment and further buildup of suspended dross particles on the sample surfaces. [ABSTRACT FROM AUTHOR]

Reports on the emergence of lithography tool matching as a technique for wafer fabrication. Process involved in the lithography tool matching; Reasons matching is needed; Definition of the golden standard used in matching techniques; Examples of matching.

The article presents an analysis which aims to provide a possible solution to the problem of having many defects on extreme ultraviolet lithography (EUVL) masks due to the ion beam missing the target of the mask blank deposition system. EUVL masks are composed of a substrate coated with a reflective molybdenum and silicon multilayer, consisting of 80 alternating layers of 4nm silicon and 3nm molybdenum. It presents figures which shows how the tools are used to demonstrate ione transformation.

The main process variables to produce galvanized dual phase (DP) steel sheets in continuous galvanizing lines are time and temperature of intercritical austenitizing (tIA and TIA), cooling rate (CR1) after intercritical austenitizing, holding time at the galvanizing temperature (tG) and finally the cooling rate (CR2) to room temperature. In this research work, the effects of CR1, tG and CR2 on the ultimate tensile strength (UTS), yield strength (YS), and elongation (EL) of cold rolled low carbon steel were investigated by applying an experimental central composite design and a multivariate regression model. A multi-objective optimization and the Pareto Front were used for the optimization of the continuous galvanizing heat treatments. Typical thermal cycles applied for the production of continuous galvanized AHSS-DP strips were simulated in a quenching dilatometer using miniature tensile specimens. The experimental results of UTS, YS and EL were used to fit the multivariate regression model for the prediction of these mechanical properties from the processing parameters (CR1, tG and CR2). In general, the results show that the proposed multivariate model correctly predicts the mechanical properties of UTS, YS and %EL for DP steels processed under continuous galvanizing conditions. Furthermore, it is demonstrated that the phase transformations that take place during the optimized tG (galvanizing time) play a dominant role in determining the values of the mechanical properties of the DP steel. The production of hot-dip galvanized DP steels with a minimum tensile strength of 1100 MPa is possible by applying the proposed methodology. The results provide important scientific and technological knowledge about the annealing/galvanizing thermal cycle effects on the microstructure and mechanical properties of DP steels. [ABSTRACT FROM AUTHOR]