1. Yield Learning Methodologies and Failure Isolation in Ring Oscillator Circuit for CMOS Technology Research
- Author
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A. Gaul, Andrew M. Greene, T. Levin, Dallas Lea, Victor Chan, Samuel S. Choi, Carol Boye, S. Mattam, J. S. Strane, Sean Teehan, Dechao Guo, Gauri Karve, Marc A. Bergendahl, Brad Austin, and Kangguo Cheng
- Subjects
0209 industrial biotechnology ,Yield (engineering) ,Computer science ,Hardware_PERFORMANCEANDRELIABILITY ,02 engineering and technology ,Ring oscillator ,Condensed Matter Physics ,Fault (power engineering) ,Industrial and Manufacturing Engineering ,Electronic, Optical and Magnetic Materials ,020901 industrial engineering & automation ,CMOS ,Logic gate ,Hardware_INTEGRATEDCIRCUITS ,Electronic engineering ,Field-effect transistor ,Isolation (database systems) ,Electrical and Electronic Engineering ,Hardware_LOGICDESIGN ,Electronic circuit - Abstract
We detail the use of ring oscillators (ROs) for yield learning during the research phase of a CMOS technology generation. Failing circuits are located and classified based on electrical analysis of ROs and FETs (Field Effect Transistor) wired out from RO environments. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.
- Published
- 2019