Search

Inverse lithography technology (ILT) optical proximity correction is going to play a critical role in addressing challenges of optical and EUV lithography as the industry pushes toward advanced nodes. One major barrier in adoption of ILT has been the mask writer’s inability to efficiently write curvilinear patterns. With the introduction of multibeam mask writers, this barrier has been removed and widespread adoption of ILT is imminent. Traditionally, mask writers have accepted only trapezoidal inputs to the tool, though recent trends show that mask writers are adopting newer formats that already reduce file size. However, as the ILT shape complexity and data volume increases further for 5 nm nodes and beyond, the explosion of mask pattern data file size becomes a major concern. Therefore, there is a need for the industry to look toward other compact formats of data representation that will be capable of serving well for multiple generations of mask making. We compare various curvilinear data representation schemes and their value in the curvilinear ILT-based mask manufacturing flow. We demonstrate that given the nature of curvilinear data, representing it using native curve formats has significant value to reduce file size for future mask making flows. The same format may not be applicable for all types of features in the input mask. These options will be discussed. We will compare the value of such exotic representations with regular simplification approaches that reduce data volume using standard methods and discuss the extents and limits of all these techniques. To evaluate practical use of curvilinear representation in place of conventional piecewise linear representation, we manufacture and measure a photomask to evaluate the accuracy of curvilinear representations. Finally, we use EUV AIMS to assess the impact of curvilinear representation on wafer process window.

In the recent past, scaling of semiconductor fabrication systems has been dominated by wavelength and numerical aperture modifications. This is now no longer the case for 193-nm immersion projection lithography (193i) systems as there are no technical paths for continued benefit from the in these areas. Instead, a range of techniques including patterning processes and system optimization are being used to push the limits of the system. This paper will review the elements that are now driving scaling for a system of fixed wavelength and numerical aperture.