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In the era of the Internet of Things, various electronics play an important role in information interaction, in which the power supply is an urgent problem to be solved. Triboelectric nanogenerator (TENG) is an emerging mechanical energy harvesting technology that can serve as a power source for electronics, which is developing towards high performance, miniaturization and integration. Herein, the advanced micro-nano manufacturing technologies are systematically reviewed for TENGs. First, film preparation such as physical vapor deposition, chemical vapor deposition, electrochemical deposition, electrospinning and screen printing for triboelectric layers are introduced and discussed. Then, surface processing, such as soft lithography, laser ablation, inductively coupled plasma and nanoimprint for micro-nano structures on the surface of triboelectric layers are also introduced and discussed. In addition, micro-electromechanical system fabrication for TENG devices such as acoustic and vibration sensors, is introduced, and their current challenges are analyzed. Finally, the challenges of the advanced micro-nano manufacturing technologies for the TENGs are systematically summarized, and further development is prospected. [ABSTRACT FROM AUTHOR]

• An intrinsically stretchable tribotronic mechanoplastic artificial synapse was proposed. • The device can be modulated by the triboelectric potential induced by mechanical stimulation. • The device establishes an active mechanically adjustable synaptic plasticity. Stretchable synaptic devices with adaptability to elastic deformation, sensing environmental stimuli, and unique information processing functions are of great significance for the development of the next generation of artificial nervous systems. Here, an intrinsically stretchable tribotronic mechanoplastic artificial synapse (STMAS) is proposed, which is integrated by a triboelectric nanogenerator and an electrolyte-gated transistor with ion-gel as dielectric layer. The STMAS can be modulated by the triboelectric potential induced by mechanical stimulation without the need to apply an external gate voltage, achieving an active mechanical tuning of synaptic plasticity such as excitatory postsynaptic current, paired-pulse facilitation, short-term plasticity, and long-term plasticity. The STMAS exhibits stable synaptic plasticity under 0–50% stretcher strain in parallel and vertical to channel directions, respectively. Furthermore, the International Morse code triggered by mechanical signals has been successfully mimicked. This work has achieved an intrinsically stretchable tribotronic artificial synapse with mechanically tuned synaptic behavior, which will help promote the development of artificial nervous systems and expand the applications of artificial synapses in intelligent robotics, artificial limbs and human–machine interaction. [ABSTRACT FROM AUTHOR]

Power management is an efficacious route to promote the development of triboelectric nanogenerators (TENGs), in which the buck switch for efficient energy extraction has always been a challenge. Here, we propose a three-port cantilever buck switch which can autonomously release energy from the TENG in maximum by the generated electrostatic field of the TENG. The influence of closing voltage of the buck switch on different structure parameters has been thoroughly investigated. The U-Q curve indicates that the optimal energy extraction can reach 90.86%, and the matched impedance of the TENG is reduced from 60 MΩ to 470 kΩ. Compared to the output power at matched impedance, the average power managed by this three-port cantilever buck switch is increased by 1.554 times, which can power the Bluetooth device, electronic watch, calculator and thermo-meter. This work has realized ultra-efficient power management of TENG by leveraging an autonomous cantilever buck switch, which can contribute to the efficient utilization of micromechanical energy. • A three-port cantilever buck switch controlled by the electrostatic field of the TENG for its power management is pioneered. • A detailed analysis of the force-electricity conversion process has been conducted. • U-Q curve and P-R curve has been linked to characterize the output efficiency for the first time. [ABSTRACT FROM AUTHOR]

A compact, springless, easy-to-process kirigami-inspired TENG (KI-TENG) is developed. The frequency responses of the KI-TENG under the influence of mass, acceleration, and initial distance are investigated in detail to optimize its structural design. Moreover, the TENG coupled with the kirigami structure could collect ultra-wide-band vibration energy and as a sensor measuring acceleration. [Display omitted] • A compact and springless kirigami-inspired TENG (KI-TENG) is developed. • The frequency response characteristics of the KI-TENG are investigated. • The KI-TENG can harvest ultra-wide-band vibration energy from 2 to 49 Hz. • The output of the KI-TENG at different vibration tilt angles is explored. • The KI-TENG can effectively monitor acceleration changes from 1 to 9 m/s2. Triboelectric Nanogenerators (TENGs) based on spring-assisted structures play a central role in scavenging vibrational energy that is widely available in the natural environment. However, they suffer from difficulties in adjusting the stiffness and bonding the springs to the triboelectric layer. Here, a kirigami-inspired TENG (KI-TENG) with a kirigami structure is demonstrated, which can be used as an ultra-wide-band vibrational energy harvester and self-powered acceleration sensor. The triboelectric layer of the KI-TENG can be easily processed into the kirigami structure with one or two-degree-of-freedom by laser cutting technology. The frequency responses of the KI-TENG under the influence of mass, acceleration, and initial distance are investigated in detail to optimize the structural design. With optimized structural parameters, the KI-TENG can not only harvest broadband vibration energy from 2 to 49 Hz in vertical vibration state but also obtain high output performance over a wide frequency range in horizontal vibration state. Moreover, the KI-TENG can be used as a sensor measuring acceleration from 1 to 9 m/s2. This work demonstrates a compact TENG coupled with the kirigami structure for energy harvesting and active sensing, which has great prospects in intelligent plants, artificial intelligence, and the internet age. [ABSTRACT FROM AUTHOR]