1. Improved signal model for confocal sensors accounting for object depending artifacts
- Author
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Florian, Mauch, Wolfram, Lyda, Marc, Gronle, and Wolfgang, Osten
- Subjects
Equipment Failure Analysis ,Microscopy, Confocal ,Image Interpretation, Computer-Assisted ,Computer-Aided Design ,Reproducibility of Results ,Computer Simulation ,Equipment Design ,Models, Theoretical ,Artifacts ,Image Enhancement ,Sensitivity and Specificity ,Algorithms ,Lenses - Abstract
The conventional signal model of confocal sensors is well established and has proven to be exceptionally robust especially when measuring rough surfaces. Its physical derivation however is explicitly based on plane surfaces or point like objects, respectively. Here we show experimental results of a confocal point sensor measurement of a surface standard. The results illustrate the rise of severe artifacts when measuring curved surfaces. On this basis, we present a systematic extension of the conventional signal model that is proven to be capable of qualitatively explaining these artifacts.
- Published
- 2012