Search

Your search keyword '"Shamiryan, D."' showing total 5 results
Start Over Author "Shamiryan, D." Search Limiters Available in Library Collection
5 results on '"Shamiryan, D."'

5. Alternative gate dielectric materials

Author

Sven Van Elshocht, An Hardy, S. De Gendt, Christophe Adelmann, David P. Brunco, Matty R. Caymax, Thierry Conard, Pietro Delugas, Peer Lehnen, Denis Shamiryan, Rita Vos, Thomas Witters, Paul Zimmerman, Marc M. Meuris, Marc M. Heyns, Van Elshocht, S., HARDY, An, De Gendt, S., Adelmann, D., Brunco, D., Caymax, M., Conard, T., Delugas, P., Lehnen, P., Shamiryan, D., Vos, R., Witters, P., Zimmerman, P., MEURIS, Marc, and Heyns, M.

Abstract

The semiconductor industry is facing the challenging task of finding a candidate to replace silicon oxide, which has been the CMOS gate dielectric of choice for more than 50 years. A material with a dielectric constant (k) higher than SiO2 will allow making the dielectric thicker by a factor of k/k(SiO2), hence lowering the gate current leakage levels, and this without reduction of the capacitance and thus performance.

Published
2006

Catalog

Books, media, physical & digital resources
See catalog results