1. Quantum Dot Lasers Directly Grown on 300 mm Si Wafers: Planar and In-Pocket.
- Author
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Feng, Kaiyin, Shang, Chen, Hughes, Eamonn, Clark, Andrew, Koscica, Rosalyn, Ludewig, Peter, Harame, David, and Bowers, John
- Subjects
QUANTUM dots ,LASER pumping ,MOLECULAR beam epitaxy ,ACTIVE medium ,LASERS - Abstract
We report for the first time the direct growth of quantum dot (QD) lasers with electrical pumping on 300 mm Si wafers on both a planar template and in-pocket template for in-plane photonic integration. O-band lasers with five QD layers were grown with molecular beam epitaxy (MBE) in a 300 mm reactor and then fabricated into standard Fabry–Perot ridge waveguide cavities. Edge-emitting lasers are demonstrated with high yield and reliable results ready for commercialization and scaled production, and efforts to make monolithically integrated lasing cavities grown on silicon-on-insulator (SOI) wafers vertically aligned and coupled to SiN waveguides on the same chip show the potential for 300 mm-scale Si photonic integration with in-pocket direct MBE growth. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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