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Arcus provides high-resolution soft X-ray spectroscopy in the 12-50 Å bandpass with unprecedented sensitivity, including spectral resolution < 2500 and effective area < 250 cm^2. The three top science goals for Arcus are (1) to measure the effects of structure formation imprinted upon the hot baryons that are predicted to lie in extended halos around galaxies, (2) to trace the propagation of outflowing mass, energy, and momentum from the vicinity of the black hole to extragalactic scales as a measure of their feedback, and (3) to explore how stars form and evolve. Arcus uses the same 12 m focal length grazing-incidence Silicon Pore X-ray Optics (SPOs) that ESA has developed for the Athena mission; the focal length is achieved on orbit via an extendable optical bench. The focused X-rays from these optics are diffracted by high-efficiency Critical-Angle Transmission (CAT) gratings, and the results are imaged with flight-proven CCD detectors and electronics. Combined with the high-heritage NGIS LEOStar-2 spacecraft and launched into 4:1 lunar resonant orbit, Arcus provides high sensitivity and high efficiency observing of a wide range of astrophysical sources.

The combination of the hot slumping and the Ion Beam Figuring (IBF) technologies can be a very competitive solution for the realization of x-ray optics with excellent imaging capabilities and high throughput. While very thin mirrors segments can be realized by slumping with residual figure errors below few hundreds of nanometres, a non-contact and deterministic process (dependent on dwell time), like IBF, is a very effective post facto correction, as it avoids all the problems due to the handling and the supporting system. In the last years, the two processes were proven compatible with very thin sheet of Eagle XG glasses (0.4 mm thickness). Nevertheless, the fast convergence of the process is a key factor to limit the cost of the mirror plate production. A deeper characterization of removal function stability showed that its repeatability between each run has to be improved for a real enhancement of the process convergence factor. A new algorithm based on de-convolution has been implemented and tested, with important advantages in terms of calculation speed, minimum material removal and optimization possibilities. By analysing the metrological data of test slumped glasses, we showed how the IBF is effective in the correction of figure errors on scales above 8 - 10 mm. An overall figuring time of few hours is required with surface error around 100 nm rms. Thanks to the thickness measurement data, which are performed in transmission mode with an interferometric set-up, we demonstrated that it is possible to disentangle the effective amount of the material removed and the deformations introduced during the process.

The high-quality surface characteristics, both in terms of figure error and of micro-roughness, required on the mirrors of a high angular resolution x-ray telescope are challenging, but in principle well suited with a deterministic and non-contact process like the ion beam figuring. This process has been recently proven to be compatible even with very thin (thickness around 0.4mm) sheet of glasses (like D263 and Eagle). In the last decade, these types of glass have been investigated as substrates for hot slumping, with residual figure errors of hundreds of nanometres. In this view, the mirrors segments fabrication could be envisaged as a simple two phases process: a first replica step based on hot slumping (direct/indirect) followed by an ion beam figuring which can be considered as a post-fabrication correction method. The first ion beam figuring trials, realized on flat samples, showed that the micro-roughness is not damaged but a deeper analysis is necessary to characterize and eventually control/compensate the glass shape variations. In this paper, we present the advancements in the process definition, both on flat and slumped glass samples.

The adaptive optics system for the SMARTX telescope consists of piezoelectric PbZr 0.52 Ti 0.48 O 3 (PZT) thin films deposited on the backside of the mirror. To achieve sufficient strain response from the piezoelectric films, the substrates chosen are thin, flexible glass pieces that can be slumped into the desired curvature. Preliminary testing has been performed using flat pieces and parts that were slumped into a cylindrical geometry. Commercially available boro-aluminosilicate glass segments (100 × 100 mm) were slumped along one axis to a radius of curvature of 220 mm. 2-μm-thick PZT films were deposited via RF magnetron sputtering on flat glass substrates to demonstrate the viability of the processing approach. The deposited PZT showed high yield (>95%) on 1-cm 2 electrodes. The films exhibited relative permittivity values near 1500 and loss tangents below 0.05. In addition, the remanent polarization was 20 μC/cm 2 with coercive fields near 30 kV/cm. 1-μm-thick films with comparable electrical parameters were then deposited onto the slumped substrates. To understand the piezoelectric response of the films and characterize the device performance, influence function measurements were performed. The typical cell response using a 4 V (1.3V c ) drive voltage corresponded to a 0.5 μm out-of-plane displacement, which relates to an in-plane strain value larger than 150 ppm. Both of these parameters meet benchmark requirements for reaching the targeted 0.5 arcsecond resolution goal of the SMART-X telescope. These results demonstrate a viable route to fabricate highly functional mirror segments for the SMART-X telescope.

Lynx, one of the four strategic mission concepts under study for the 2020 Astrophysics Decadal Survey, provides leaps in capability over previous and planned x-ray missions and provides synergistic observations in the 2030s to a multitude of space- and ground-based observatories across all wavelengths. Lynx provides orders of magnitude improvement in sensitivity, on-axis subarcsecond imaging with arcsecond angular resolution over a large field of view, and high-resolution spectroscopy for point-like and extended sources in the 0.2- to 10-keV range. The Lynx architecture enables a broad range of unique and compelling science to be carried out mainly through a General Observer Program. This program is envisioned to include detecting the very first seed black holes, revealing the high-energy drivers of galaxy formation and evolution, and characterizing the mechanisms that govern stellar evolution and stellar ecosystems. The Lynx optics and science instruments are carefully designed to optimize the science capability and, when combined, form an exciting architecture that utilizes relatively mature technologies for a cost that is compatible with the projected NASA Astrophysics budget.

Piezoelectric adjustable x-ray optics use magnetron sputtered thin film coatings on both sides of a thin curved glass substrate. To produce an optic suitable for a mission requiring high-angular resolution like “Lynx,” the integrated stresses (stress×thickness) of films on both sides of the optic must be approximately equal. Thus, understanding how sputtered film thickness distributions change for convex and concave curved substrates is necessary. To address this, thickness distributions of piezoelectric Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3 films are studied on flat, convex, and concave cylindrical substrates with a 220-mm radius of curvature. A mathematical model of the film thickness distribution is derived based on the geometric properties of the sputter tool and the substrate, and film thicknesses deposited with a commercially available sputtering tool are measured with spectroscopic ellipsometry. Experiment and modeled results for flat and convex curved substrates demonstrate good agreement, with average relative thickness distribution difference of 0.19% and −0.10% respectively, and a higher average difference of 1.4% for concave substrates. The calculated relative thickness distributions are applied to the convex and concave sides of a finite-element analysis (FEA) model of an adjustable x-ray optic prototype. The FEA model shows that, left uncorrected, the relative film thickness variation will yield an optic with an optical performance of 2.6 arc sec half power diameter (HPD) at 1 keV. However, the mirror figure can be corrected to diffraction-limited performance (0.3 arc sec HPD) using the piezoelectric adjusters, suggesting that the tolerances for applying a balanced integrated stress on both sides of a mirror are alleviated for adjustable x-ray optics as compared to traditional static x-ray mirrors. Furthermore, the piezoelectric adjusters will also allow changes in mirror figure over the telescope lifetime due to drift in the stress states of the x-ray surfaces to be corrected on orbit.

In order to advance significantly scientific objectives, future x-ray astronomy missions will likely call for x-ray telescopes with large aperture areas (≍ 3 m2) and fine angular resolution (≍ 12). Achieving such performance is programmatically and technologically challenging due to the mass and envelope constraints of space-borne telescopes and to the need for densely nested grazing-incidence optics. Such an x-ray telescope will require precision fabrication, alignment, mounting, and assembly of large areas (≍ 600 m2) of lightweight (≍ 2 kg/m2 areal density) high-quality mirrors, at an acceptable cost (≍ 1 M$/m2 of mirror surface area). This paper reviews relevant programmatic and technological issues, as well as possible approaches for addressing these issues-including direct fabrication of monocrystalline silicon mirrors, active (in-space adjustable) figure correction of replicated mirrors, static post-fabrication correction using ion implantation, differential erosion or deposition, and coating-stress manipulation of thin substrates....

Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

Adjustable X-ray optics represent a potential enabling technology for simultaneously achieving large effective area and high angular resolution for future X-ray Astronomy missions. The adjustable optics employ a bimorph mirror composed of a thin (1.5 μm) film of piezoelectric material deposited on the back of a 0.4 mm thick conical mirror segment. The application of localized electric fields in the piezoelectric material, normal to the mirror surface, result in localized deformations in mirror shape. Thus, mirror fabrication and mounting induced figure errors can be corrected, without the need for a massive reaction structure. With this approach, though, film stresses in the piezoelectric layer, resulting from deposition, crystallization, and differences in coefficient of thermal expansion, can distort the mirror. The large relative thickness of the piezoelectric material compared to the glass means that even 100MPa stresses can result in significant distortions. We have examined compensating for the piezoelectric processing related distortions by the deposition of controlled stress chromium/iridium films on the front surface of the mirror. We describe our experiments with tuning the product of the chromium/iridium film stress and film thickness to balance that resulting from the piezoelectric layer. We also evaluated the repeatability of this deposition process, and the robustness of the iridium coating....

NASA's Chandra X-ray Observatory continues to provide an unparalleled means for exploring the high-energy universe. With its half-arcsecond angular resolution, Chandra studies have deepened our understanding of galaxy clusters, active galactic nuclei, galaxies, supernova remnants, neutron stars, black holes, and solar system objects. As we look beyond Chandra, it is clear that comparable or even better angular resolution with greatly increased photon throughput is essential to address ever more demanding science questions—such as the formation and growth of black hole seeds at very high redshifts; the emergence of the first galaxy groups; and details of feedback over a large range of scales from galaxies to galaxy clusters. Recently, we initiated a concept study for such a mission, dubbed X-ray Surveyor. The X-ray Surveyor strawman payload is comprised of a high-resolution mirror assembly and an instrument set, which may include an X-ray microcalorimeter, a high-definition imager, and a dispersive grating spectrometer and its readout. The mirror assembly will consist of highly nested, thin, grazing-incidence mirrors, for which a number of technical approaches are currently under development—including adjustable X-ray optics, differential deposition, and new polishing techniques applied to a variety of substrates. This study benefits from previous studies of large missions carried out over the past two decades and, in most areas, points to mission requirements no more stringent than those of Chandra.

We report on improvements in our efforts to control and characterize piezoelectrically adjustable, thin glass optics. In the past, an optical profilometer and a Shack-Hartmann wavefront sensor have been used to measure influence functions for a at adjustable mirror. An electronics system has since been developed to control > 100 actuator cells and has been used in a full calibration of a high-yield at adjustable mirror. The calibrated influence functions have been used to induce a pre-determined figure change to the mirror, representing our first attempt at figure control of a full mirror. Furthermore, we have adapted our metrology systems for cylindrical optics, allowing characterization of Wolter-type mirrors. We plan to use this metrology to perform the first piezoelectric figure correction of a cylindrical mirror over the next year....

We describe progress in the development of adjustable grazing incidence X-ray optics for 0.5 arcsec resolution cosmic X-ray imaging. To date, no optics technology is available to blend high resolution imaging like the Chandra X-ray Observatory, with square meter collecting area. Our approach to achieve these goals simultaneously is to directly deposit thin film piezoelectric actuators on the back surface of thin, lightweight Wolter-I or Wolter- Schwarschild mirror segments. The actuators are used to correct mirror figure errors due to fabrication, mounting and alignment, using calibration and a one-time figure adjustment on the ground. If necessary, it will also be possible to correct for residual gravity release and thermal effects on-orbit. In this paper we discuss our most recent results measuring influence functions of the piezoelectric actuators using a Shack-Hartmann wavefront sensor. We describe accelerated and real-time lifetime testing of the piezoelectric material, and we also discuss changes to, and recent results of, our simulations of mirror correction.

The future of x-ray astronomy depends upon development of x-ray telescopes with larger aperture areas (approx. = 3 square meters) and fine angular resolution (approx. = 1 inch). Combined with the special requirements of nested grazing-incidence optics, the mass and envelope constraints of space-borne telescopes render such advances technologically and programmatically challenging. Achieving this goal will require precision fabrication, alignment, mounting, and assembly of large areas (approx. = 600 square meters) of lightweight (approx. = 1 kilogram/square meter areal density) high-quality mirrors at an acceptable cost (approx. = 1 million dollars/square meter of mirror surface area). This paper reviews relevant technological and programmatic issues, as well as possible approaches for addressing these issues-including active (in-space adjustable) alignment and figure correction.

Addressing the astrophysical problems of the 2020's requires sub-arcsecond x-ray imaging with square meter effective area. Such requirements can be derived, for example, by considering deep x-ray surveys to find the young black holes in the early universe (large redshifts) which will grow into the first supermassive black holes. We have envisioned a mission based on adjustable x-ray optics technology, in order to achieve the required reduction of mass to collecting area for the mirrors. We are pursuing technology which effects this adjustment via thin film piezoelectric "cells" deposited directly on the non-reflecting sides of thin, slumped glass. While SMARTX will also incorporate state-of-the-art x-ray cameras, the remaining spacecraft systems have no more stringent requirements than those which are well understood and proven on the current Chandra X-ray Observatory.

In the half century since the initial discovery of an astronomical (non-solar) x-ray source, the sensitivity for detection of cosmic x-ray sources has improved by ten orders of magnitude. Largely responsible for this dramatic progress has been the refinement of the (grazing-incidence) focusing x-ray telescope. The future of x-ray astronomy relies upon the development of x-ray telescopes with larger aperture areas (greater than 1 m2) and finer angular resolution (less than 1.). Combined with the special requirements of grazing-incidence optics, the mass and envelope constraints of space-borne telescopes render such advances technologically challenging.requiring precision fabrication, alignment, and assembly of large areas (greater than 100 m2) of lightweight (approximately 1 kg m2 areal density) mirrors. Achieving precise and stable alignment and figure control may entail active (in-space adjustable) x-ray optics. This paper discusses relevant programmatic and technological issues and summarizes progress toward active x-ray telescopes.

High-energy astrophysics is a relatively young scientific field, made possible by space-borne telescopes. During the half-century history of x-ray astronomy, the sensitivity of focusing x-ray telescopes-through finer angular resolution and increased effective area-has improved by a factor of a 100 million. This technological advance has enabled numerous exciting discoveries and increasingly detailed study of the high-energy universe-including accreting (stellar-mass and super-massive) black holes, accreting and isolated neutron stars, pulsar-wind nebulae, shocked plasma in supernova remnants, and hot thermal plasma in clusters of galaxies. As the largest structures in the universe, galaxy clusters constitute a unique laboratory for measuring the gravitational effects of dark matter and of dark energy. Here, we review the history of high-resolution x-ray telescopes and highlight some of the scientific results enabled by these telescopes. Next, we describe the planned next-generation x-ray-astronomy facility-the International X-ray Observatory (IXO). We conclude with an overview of a concept for the next next-generation facility-Generation X. The scientific objectives of such a mission will require very large areas (about 10000 m2) of highly-nested lightweight grazing-incidence mirrors with exceptional (about 0.1-arcsecond) angular resolution. Achieving this angular resolution with lightweight mirrors will likely require on-orbit adjustment of alignment and figure., Comment: 19 pages, 11 figures, SPIE Conference 7803 "Adaptive X-ray Optics", part of SPIE Optics+Photonics 2010, San Diego CA, 2010 August 2-5

The Constellation-X Spectroscopy X-ray Telescope (SXT) is a segmented, tightly nested Wolter-I telescope with a requirement of approximately 12.5 Ž half-power diameter (HPD) for the mirro r system. The individual mirror segments are 0.4-mm thick, formed glass, making the task of mounting, alignment and bonding extremely challenging. Over the past year we have developed a series of tools to meet these challenges, the latest of which is an upgrade to the 600-meter x-ray beam line at GSFC. The new facilities allow us to perform full-aperture and sub-aperture imaging tests of mirror segment pairs to locate th e source of deformations and correlate them with our optical metrology. We present the optical metrology of the axial figure and Hartmann focus, x-ray imaging performance predictions based on analysis of the optical metrology, and both full-aperture and sub-aperture x-ray imaging performance of test mirror segment pairs at 8.05 keV. Keywords: X-ray optics, x-ray imaging, metrology, performance prediction, integration and test

X-rays provide one of the few bands through which we can study the epoch of reionization, when the first galaxies, black holes and stars were born. To reach the sensitivity required to image these first discrete objects in the universe needs a major advance in X-ray optics. Generation-X (Gen-X) is currently the only X-ray astronomy mission concept that addresses this goal. Gen-X aims to improve substantially on the Chandra angular resolution and to do so with substantially larger effective area. These two goals can only be met if a mirror technology can be developed that yields high angular resolution at much lower mass/unit area than the Chandra optics, matching that of Constellation-X (Con-X). We describe an approach to this goal based on active X-ray optics that correct the mid-frequency departures from an ideal Wolter optic on-orbit. We concentrate on the problems of sensing figure errors, calculating the corrections required, and applying those corrections. The time needed to make this in-flight calibration is reasonable. A laboratory version of these optics has already been developed by others and is successfully operating at synchrotron light sources. With only a moderate investment in these optics the goals of Gen-X resolution can be realized., Enhanced version of SPIE presentation. 11 pages, 5 figures