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The system architecture and functional characteristics of flexible substation are different from those of traditional substation, it is necessary to establish a comprehensive benefit evaluation system which conforms to the technical and economical characteristics of flexible substation. Considering that various functions of flexible substation demonstration project, a scientific comprehensive benefit evaluation system of flexible substation is established from three aspects of technical benefit, economic benefit and social benefit. Using system dynamics to analysis the relationship between the various indicators, build accurate system dynamics (SD) model of comprehensive benefit evaluation, and make simulation. Based on the simulation results, analyze the relationship between the comprehensive benefits and the influence factors, not only provide a theoretical basis for the benefit of the project demonstration substation flexible analysis, but also provide theoretical guidance for application of flexible substation demonstration project.