1. Growth and Characterization of Bulk, Semi-Insulating Gallium Arsenide.
- Author
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ARMY ELECTRONICS RESEARCH AND DEVELOPMENT COMMAND FORT MONMOUTH NJ ELECTRONICS TECHNOLOGY/DEVICES LAB, Ross,R L, AuCoin,T R, Savage,R O, Winter,J J, malik,R O, ARMY ELECTRONICS RESEARCH AND DEVELOPMENT COMMAND FORT MONMOUTH NJ ELECTRONICS TECHNOLOGY/DEVICES LAB, Ross,R L, AuCoin,T R, Savage,R O, Winter,J J, and malik,R O
- Abstract
The physical and electrical properties of GaAs show it to be an important semiconductor material for use in various electronic devices associated with advanced military systems. However, the realization of enhanced device performance has been delayed, partly due to the lack of consistent, high quality, semi-insulating GaAs substrate material. A modified liquid-encapsulated Czochralski technique employing pressure-assisted, in-situ compounding is described. This process, first demonstrated in the United States by the US Army Electronics Technology and Devices Laboratory, consistently yields high resistivity (to 10 to the 9th power ohm-cm) GaAs without the intentional addition of charge compensators. This approach is now becoming the basis for U.S. volume production of large diameter, high quality, semi-insulating GaAs material. An automated system for the measurement of transport properties by use of the van der Pauw method is described. A mixed conduction analysis allows the direct determination of individual carrier concentrations and mobilities, intrinsic carrier concentration and Fermi level. Applied to ET&DL's non-Cr-doped GaAs, this analysis yields electron mobilities higher than Cr-doped material and Fermi levels which are nearly intrinsic. (Author)
- Published
- 1981