1. Integration Processes for nPERT Si Solar Cells Using Single Side Emitter Epitaxy and front Side Laser Doping.
- Author
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Kuzma-Filipek, Izabela, Recaman-Payo, Maria, Li, Yuandong, Hajjiah, Ali, Duerinckx, Filip, Cornagliotti, Emanuele, Castro, Angel Uruena De, Sharma, Aashish, Borgers, Tom, Russell, Richard, Tous, Loic, John, Joachim, Haslinger, Michael, Aleman, Monica, and Szlufcik, Jozef
- Abstract
This work focuses on the fabrication of nPERT(Passivated Emitter, Rear Totally Diffused) devices incorporating an epitaxially grown single side rear-emitter. Such epi-nPERT cells are fabricated in a simplified way using the selectivity of the epitaxial deposition, which is obtained by a PECVD-SiOxlayer, that not only mask the front but also passivates the cell. The cell performance is studied in terms of: i) various front surface fields (FSF) applied prior to emitter epitaxy and ii) usage of laser doping as an alternative to laser ablation for a front contacting scheme. The results show: i) a clear relationship between the depth of the homogeneous FSF and its impact on the open circuit voltage of the devices, with a shallow FSF having the highest V OC loss due to laser damage and ii) laser doping on devices with a relatively deep diffused FSF giving 8 mV increase in V OC as compared to devices with ablated dielectrics and a V OC increase of almost 30 mV in case a shallow selective FSF is applied. This results in a best efficiency obtained so far for the epi nPERT devices of 21.6% (226 cm 2 ). [ABSTRACT FROM AUTHOR]
- Published
- 2015
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