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Highlights • A new and high precision micro-scanning component design method was proposed. • A thermal microscope imaging system based on an uncooled infrared detector. • Micro-scanning technology is used in thermal microscope imaging systems to improve its spatial resolution. Abstract In order to meet the needs of subtle thermal analysis, We developed a thermal microscope imaging system based on uncooled focal plane detector in 2008. But for more sophisticated observations, the higher spatial resolution of thermal microscope imaging system is needed. Optical micro-scanning technology is one of the effective techniques to solve this problem. It can improve the systems spatial resolution based on existing imaging devices. Early we have developed an optical micro-scanning thermal microscope imaging system. But the system has a large micro-scanning error and requires high accuracy on the mechanical manufacturing and optical processing, which is not conducive to product. In order to reduce the micro-scanning error of developed optical micro-scanning thermal microscope imaging system and improve the spatial resolution of the system, a high precision micro-scanning component design method was proposed. The working principle of optical flat plate rotation micro-scanning is analyzed. The parameters and processing tolerances of micro-scanner are given. The integrated design and processing are realized with the existing uncooled thermal microscope imaging system. Results of standard oversample reconstruction for the real thermal microscope images have shown that the system is designed successfully and achieves higher resolution. It can be applied to high resolution micro-thermal analysis. [ABSTRACT FROM AUTHOR]