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Your search keyword '"Demenev, Evgeny"' showing total 6 results
Start Over Author "Demenev, Evgeny" Publisher wiley-vch verlag
6 results on '"Demenev, Evgeny"'

1. Surface evolution of very high dose arsenic implants in silicon formed by plasma immersion ion implantation - a long term study

Author

Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Meirer, Florian, Demenev, Evgeny, Giubertoni, Damiano, Vanzetti, Lia, Gennaro, Salvatore, Fedrizzi, Michele, Pepponi, Giancarlo, Steinhauser, Georg, Vishwanath, Vinayak, Foad, Majeed, Bersani, Massimo, Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Meirer, Florian, Demenev, Evgeny, Giubertoni, Damiano, Vanzetti, Lia, Gennaro, Salvatore, Fedrizzi, Michele, Pepponi, Giancarlo, Steinhauser, Georg, Vishwanath, Vinayak, Foad, Majeed, and Bersani, Massimo

Published
2014

2. Observation of point defect injection from electrical deactivation of arsenic ultra-shallow distributions formed by ultra-low energy ion implantation and laser sub-melt annealing

Author

Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Demenev, Evgeny, Meirer, Florian, Essa, Zahi, Giubertoni, Damiano, Cristiano, Fuccio, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, Foad, Majeed A., Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Demenev, Evgeny, Meirer, Florian, Essa, Zahi, Giubertoni, Damiano, Cristiano, Fuccio, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, and Foad, Majeed A.

Published
2014

3. Surface evolution of very high dose arsenic implants in silicon formed by plasma immersion ion implantation - a long term study

Author

Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Meirer, Florian, Demenev, Evgeny, Giubertoni, Damiano, Vanzetti, Lia, Gennaro, Salvatore, Fedrizzi, Michele, Pepponi, Giancarlo, Steinhauser, Georg, Vishwanath, Vinayak, Foad, Majeed, Bersani, Massimo, Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Meirer, Florian, Demenev, Evgeny, Giubertoni, Damiano, Vanzetti, Lia, Gennaro, Salvatore, Fedrizzi, Michele, Pepponi, Giancarlo, Steinhauser, Georg, Vishwanath, Vinayak, Foad, Majeed, and Bersani, Massimo

Published
2014

4. Observation of point defect injection from electrical deactivation of arsenic ultra-shallow distributions formed by ultra-low energy ion implantation and laser sub-melt annealing

Author

Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Demenev, Evgeny, Meirer, Florian, Essa, Zahi, Giubertoni, Damiano, Cristiano, Fuccio, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, Foad, Majeed A., Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Demenev, Evgeny, Meirer, Florian, Essa, Zahi, Giubertoni, Damiano, Cristiano, Fuccio, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, and Foad, Majeed A.

Published
2014

5. Surface evolution of very high dose arsenic implants in silicon formed by plasma immersion ion implantation - a long term study

Author

Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Meirer, Florian, Demenev, Evgeny, Giubertoni, Damiano, Vanzetti, Lia, Gennaro, Salvatore, Fedrizzi, Michele, Pepponi, Giancarlo, Steinhauser, Georg, Vishwanath, Vinayak, Foad, Majeed, Bersani, Massimo, Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Meirer, Florian, Demenev, Evgeny, Giubertoni, Damiano, Vanzetti, Lia, Gennaro, Salvatore, Fedrizzi, Michele, Pepponi, Giancarlo, Steinhauser, Georg, Vishwanath, Vinayak, Foad, Majeed, and Bersani, Massimo

Published
2014

6. Observation of point defect injection from electrical deactivation of arsenic ultra-shallow distributions formed by ultra-low energy ion implantation and laser sub-melt annealing

Author

Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Demenev, Evgeny, Meirer, Florian, Essa, Zahi, Giubertoni, Damiano, Cristiano, Fuccio, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, Foad, Majeed A., Debye Institute, Inorganic Chemistry and Catalysis, Sub Inorganic Chemistry and Catalysis, Demenev, Evgeny, Meirer, Florian, Essa, Zahi, Giubertoni, Damiano, Cristiano, Fuccio, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, and Foad, Majeed A.

Published
2014

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