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The objective of this article is to develop and apply a model for the design and evaluation of X-ray diffraction experiments to measure phase-specific residual stress profiles in multilayer systems. Using synchrotron radiation and angledispersive diffraction, the stress measurements are performed on the basis of the sin2 method. Instead of the traditional Ω or X mode, the experiments are carried out by a simultaneous variation of the goniometer angles X, Ω and ψG to ensure that the penetration and information depth and the measuring direction ψ remain unchanged when the polar angle ψ is varied. The applicability of this measuring and evaluation strategy is demonstrated by the example of a multilayer system consisting of Ti and TiAlN layers, alternately deposited on a steel substrate by means of physical vapour deposition. [ABSTRACT FROM AUTHOR]