1. Synthesis of WN(NMe2)3 as a Precursor for the Deposition of WN x Nanospheres.
- Author
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McClain, K. Randall, O'Donohue, Christopher, Shi, Zhiwei, Walker, Amy V., Abboud, Khalil A., Anderson, Tim, and McElwee-White, Lisa
- Subjects
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TUNGSTEN compounds , *AMIDES , *ALKOXIDES , *MOLECULAR structure , *CHEMICAL vapor deposition , *NANOSTRUCTURED materials - Abstract
The WN x precursor WN(NMe2)3 was prepared from WN(O tBu)3 and Zr(NMe2)4 by using an amide/alkoxide exchange reaction. Structural analysis of WN(NMe2)3 revealed an overall pseudo-tetrahedral geometry with a distortion towards trigonal pyramidal. Aerosol-assisted chemical vapor deposition (AACVD) from WN(NMe2)3 resulted in deposition of WN x nanospheres onto Si(100) and Si(111) substrates at low temperatures (75-125 °C). The nanospheres were imaged by SEM and characterized by using energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). These preliminary results demonstrate the viability of WN(NMe2)3 as a single-source precursor for the deposition of WN x at low temperature. [ABSTRACT FROM AUTHOR]
- Published
- 2012
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