1. Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic-scale trenches in supercritical carbon dioxide.
- Author
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Haruki, Masashi, Oda, Asuka, Wasada, Atsuhiko, Hasegawa, Yumi, Kihara, Shin-ichi, and Takishima, Shigeki
- Subjects
POLYIMIDES ,FLUORINATION ,SUPERCRITICAL carbon dioxide ,AMINOBIPHENYL compounds ,PHASES of matter ,POLYMERIZATION ,AMIC acids ,PROPANE - Abstract
ABSTRACT The phase appearance during the synthesis of fluorinated polyamic acid (PAA) from 2,2-bis(3,4-anhydrodicarboxyphenyl)-hexafluoropropane (6FDA) and 2,2′-bis(trifluoromethyl)−4,4′-diaminobiphenyl (TFDB) in supercritical carbon dioxide (scCO
2 ) was investigated to obtain fundamental data for the deposition of fluorinate polyimides (PI) using scCO2 . All polymerizations were carried out at 30 MPa for 60 min. The experimental temperatures ranged from 50 to 70 °C, and each of the monomer concentrations ranged from 0.67 × 10−5 to 3.3 × 10−5 mol cm−3 . The holding time of the transparent phases, which was the time from the beginning of the polymerization to the appearance of a turbid phase, was increased with either a decrease in the polymerization temperature or a decrease in the initial monomer concentration. The holding time of the fluorinated PAA was longer than that of the monomers of Kapton-type PAA. The deposition of PI into the microscopic-scale trenches that had formed on the silicon wafer was successful in scCO2 . © 2016 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2016, 133, 43334. [ABSTRACT FROM AUTHOR]- Published
- 2016
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