16 results on '"Voelskow, M."'
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2. Ion beam synthesis of 4H-(Si1-xC1-y)Gex+ysolid solutions
3. Ion beam synthesis of 3C–(Si1–xC1–y)Gex+y solid solutions
4. Temperature Dependence of Electron Beam Induced Epitaxial Crystallization of Silicon
5. High-speed electron beam annealing of arsenic and gallium implanted silicon
6. Annealing Characteristics of SiO2-Si Structures after Incoherent Light Pulse Processing
7. Investigation of Silicides Obtained by Fe+ Implantation into Silicon
8. Pulsed Incoherent Light Annealing of Arsenic and Phosphorus Implanted Polycrystalline Silicon
9. Flash lamp annealing of arsenic implanted silicon
10. Low-energy implantation of arsenic in silicon
11. A peculiarity of ion beam induced epitaxial crystallization with low implantation energies applied to doped amorphous silicon layers
12. Annealing behaviour of low-energy-implanted silicon
13. Electrical properties of ion implanted and short time annealed polycrystalline silicon
14. Dopant redistribution after flash lamp annealing
15. Epitaxial regrowth of amorphous or polycrystalline silicon layers on silicon single crystals and bridging epitaxy by flash lamp irradiation
16. Thick monocrystalline silicon on oxidized silicon wafers produced by a zone melting process using a scanning halogen lamp
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