1. Polycrystalline ZrB2coating prepared on graphite by chemical vapor deposition
- Author
-
Yushi Qi, Guiqing Chen, Peng Wang, Xinghong Zhang, Wenbo Han, Ping Hu, and Shanbao Zhou
- Subjects
010302 applied physics ,Materials science ,Hybrid physical-chemical vapor deposition ,Inorganic chemistry ,02 engineering and technology ,Chemical vapor deposition ,Combustion chemical vapor deposition ,engineering.material ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Electron beam physical vapor deposition ,Electronic, Optical and Magnetic Materials ,Coating ,0103 physical sciences ,engineering ,Deposition (phase transition) ,Graphite ,0210 nano-technology ,Water vapor - Abstract
Polycrystalline ZrB2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl4, BCl3, H2, and Ar at 1200 °C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO2 and B2O3 detected on the surface of ZrB2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB2 grains. The feasibility of preparation of ZrB2 on graphite by CVD using ZrCl4, BCl3, and H2 was verified.
- Published
- 2016