1. Development of a hybrid sputtering/evaporation process for Cu(In,Ga)Se(2) thin film solar cells
- Author
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Acciarri, M, Binetti, S, LE DONNE, A, Lorenzi, B, Caccamo, L, Miglio, L, Moneta, R, Marchionna, S, Meschia, M, ACCIARRI, MAURIZIO FILIPPO, BINETTI, SIMONA OLGA, LE DONNE, ALESSIA, LORENZI, BRUNO, MIGLIO, LEONIDA, MARCHIONNA, STEFANO, Meschia, M., Acciarri, M, Binetti, S, LE DONNE, A, Lorenzi, B, Caccamo, L, Miglio, L, Moneta, R, Marchionna, S, Meschia, M, ACCIARRI, MAURIZIO FILIPPO, BINETTI, SIMONA OLGA, LE DONNE, ALESSIA, LORENZI, BRUNO, MIGLIO, LEONIDA, MARCHIONNA, STEFANO, and Meschia, M.
- Abstract
In this paper we report a new method for Cu(In,Ga)Se(2) deposition for solar cell application. Differently from the common co-evaporation process, an alterative approach for thin film Cu(In,Ga)Se(2) has been tested: the sputtering deposition of metal elements combined with the selenium evaporation. We have studied the relationships between the growth parameters of our hybrid sputtering/evaporation method and the chemical-physical properties of the CIGS films. The cells are completed with a CdS buffer layer deposited by chemical bath deposition and ZnO + ITO deposited by RF sputtering. Test solar cells of 0.5 cm(2) have shown an efficiency of 10% and 2.5% on glass and stainless steel substrate respectively. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
- Published
- 2011