Search

We report on the surface-sensitive grazing emission X-ray fluorescence technique combined with synchrotron radiation excitation and high-resolution detection to realize depth-profile measurements of Al-implanted Si wafers. The principles of grazing emission measurements as well as the benefits offered by synchrotron sources and wavelength-dispersive detection setups are presented. It is shown that the depth distribution of implanted ions can be extracted from the dependence of the X-ray fluorescence intensity on the grazing emission angle with nanometer-scale precision provided that an analytical function describing the shape of the depth distribution is assumed beforehand. If no a priori assumption is made, except a bell shaped form for the dopant distribution, the profile derived from the measured angular distribution is found to reproduce quite satisfactorily the depth distribution of the implanted ions. Copyright © 2012 John Wiley & Sons, Ltd.

High-resolution measurements of the Kα x-ray spectra of metallic Ca, Ti, Cr and Fe were performed with a von Hamos Bragg crystal spectrometer. The target x-ray emission was induced by 34, 72 and 134 MeV C ions, 28, 64 and 230 MeV O ions and 43, 160 and 380 MeV Ne ions. The energies of the resolved KαLN x-ray satellite lines were determined. The possible variation of the energy differences between neighboring KαLN lines with the projectile energy, projectile atomic number and number of target L shell spectator vacancies was probed. No significant dependence on the projectile characteristics was observed. In contrast, the absolute energies of the KαLN satellite lines were found to depend on the projectile velocity. This dependence was attributed to the additional M shell ionization of the target atoms. Copyright © 2003 John Wiley & Sons, Ltd.

The K–LM radiative Auger (RA) x-ray spectrum of argon was observed. The transitions were photoinduced by means of an x-ray tube and measured with two different high-resolution curved crystal spectrometers of reflection-type geometry. From the first measurements performed at the Paul Scherrer Institute (PSI), only an upper limit of 0.25% relatively to the intensity of the Kα1,2 diagram line could be obtained for the total K—LM RA yield. From a second experiment carried out at the University of Fribourg, a I(K–LM RA)/I(Kα1,2) ratio of 0.18±0.05% was obtained. This value is consistent with the PSI result but in strong disagreement with theoretical predictions based on the shake model, which are about four times larger. © 1998 John Wiley & Sons, Ltd.