1. Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis
- Author
-
S. Parthiban, Elvira Fortunato, K. Ramamurthi, Rodrigo Martins, G. Gonçalves, and Elamurugu Elangovan
- Subjects
Materials science ,Doping ,Oxide ,Analytical chemistry ,chemistry.chemical_element ,Mineralogy ,Surfaces and Interfaces ,Condensed Matter Physics ,Bixbyite ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry.chemical_compound ,chemistry ,Electrical resistivity and conductivity ,Molybdenum ,Materials Chemistry ,Transmittance ,Electrical and Electronic Engineering ,Thin film ,Indium - Abstract
Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 °C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In 2 O 3 with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to ≥ 1.2 at. %. The films deposited with 0.5 at.% Mo showed high mobility of ~90 cm 2 /Vs, resistivity of ~6.8 x 10 -4 Ω cm and carrier concentration of ~1.01 × 10 20 cm -1 with > ~73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.
- Published
- 2010