1. Surface Chemical Bonding States and Ferroelectricity of Pb(Zr0.52Ti0.48)O3 Thin Films
- Author
-
C.R. Cho
- Subjects
Materials science ,Thin layers ,Analytical chemistry ,General Chemistry ,Dielectric ,Coercivity ,Condensed Matter Physics ,Lead zirconate titanate ,Ferroelectricity ,chemistry.chemical_compound ,chemistry ,X-ray photoelectron spectroscopy ,Dissipation factor ,General Materials Science ,Thin film - Abstract
The surface chemical bonding states and the ferroelectric properties of sol-gel deposited lead zirconate titanate Pb(Zr 0.52 Ti 0.48 )O 3 , PZT] thin films coated on (111)Pt/Ti/SiO 2 /Si substrates were investigated. X-ray photoelectron spectroscopy (XPS) was used to determine the oxidation state of the surface and the chemical composition as a function of depth in ferroelectric PZT thin layers. Values for the dielectric constant and dissipation factor at I kHz for the 300 nm-thick film were 1214 and 0.014 for the film annealed at 520 °C, and 881 and 0.015 for a film annealed at 670 °C. Measured values for the remanent polarization (P r ) and coercive field (E c ), from polarization-electric field (P-E) hysteresis loops biased at 10 V at a frequency of 100 Hz, were 16.7, 14.4 μC/cm 2 and 60, 41.7 kV/cm for 520 °C and 670 C. The leakage current density (J) was 72 and 96 nA/cm 2 at an applied field of 100 kV/cm. It was found that the bonding states of lead and oxygen in the surface regions could be correlated with the ferroelectric properties of the integrated thin layers.
- Published
- 2000