1. High Resolution Micro-Displacement Sensing Circuit for Rotor Micro-Gyroscope
- Author
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Xiao Wei Liu, Haifeng Zhang, Zhi Gang Mao, and Ming Yuan Ren
- Subjects
Noise power ,Engineering ,business.industry ,Rotor (electric) ,Mechanical Engineering ,Electrical engineering ,Gyroscope ,Diode-or circuit ,Hardware_PERFORMANCEANDRELIABILITY ,Discrete circuit ,Capacitance ,law.invention ,CMOS ,Parasitic capacitance ,Mechanics of Materials ,law ,Hardware_INTEGRATEDCIRCUITS ,General Materials Science ,business ,Hardware_LOGICDESIGN - Abstract
A novel CMOS interface circuit with high resolution is designed and realized to achieve the integration of interface circuit for liquid suspended rotor micro-gyroscope. The detecting circuit adopts continuous-time current sensing circuit for capacitance measurement. The equivalent output noise power spectral density of phase-sensitive demodulation is 120 nV/Hz1/2. The whole circuitry is realized with 0.5 μm 2P2M CMOS process and its testing results show the circuit has a relative capacitance resolution of 1×10-8, in which the power supply is 18 V and the power consumption is 30 mW. The area of the chip is merely 18.5 mm2.
- Published
- 2015
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