Author: "Yeom, Hee-Jung" / Publisher: the korean vacuum society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Yeom, Hee-Jung"' showing total 2 results

Start Over Author "Yeom, Hee-Jung" Publisher the korean vacuum society

2 results on '"Yeom, Hee-Jung"'

1. Brief Review of Atomic Layer Etching Based on Radiofrequency-Biased Ar/C4F6-Mixture-Based Inductively Coupled Plasma Characteristics

Author: Yoon, Min Young, primary, Yeom, Hee Jung, additional, Jeong, Jong-Ryul, additional, Kim, Jung Hyung, additional, and Lee, Hyo-Chang, additional
Published: 2023
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2. Mass Filter Characteristic and Design Role of Quadrupole Mass Spectrometer for Radical Measurement in Low-pressure Plasmas

Author: Yeom, Hee Jung, primary, Lee, Jang Jae, additional, Kim, Si Jun, additional, Lee, Young Seok, additional, Cho, Chul hee, additional, Kim, Jung Hyung, additional, Lee, Hyo-Chang, additional, and You, ShinJae, additional
Published: 2020
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