7 results on '"Shamiryan, D."'
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2. Metrology for Implanted Si Substrate Loss Studies
3. Effects of He Plasma Pretreatment on Low-k Damage during Cu Surface Cleaning with NH[sub 3] Plasma
4. Using Ellipsometry for Assessment of TiN Surface Roughness after Plasma Etch
5. Influence of TaN Gate Electrode Microstructure on Its Dry Etch Properties
6. Highly Sensitive Monitoring of Ru Etching Using Optical Emission
7. Controllable Change of Porosity of 3-Methylsilane Low-k Dielectric Film
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