Author: "Lefaucheux, Philippe" / Publisher: the electrochemical society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Lefaucheux, Philippe"' showing total 3 results

Start Over Author "Lefaucheux, Philippe" Publisher the electrochemical society

3 results on '"Lefaucheux, Philippe"'

1. Improvement of GaN Deep Etched Surface State by Fluorination Dedicated to Power Devices

Author: Gosset, Nicolas, primary, Ladroue, Julien, additional, Tillocher, Thomas, additional, Lefaucheux, Philippe, additional, Boufnichel, Mohamed, additional, and Dussart, Rémi, additional
Published: 2014
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2. Cryoetching of Silicon and Advanced Materials for 3D Interconnects

Author: Dussart, Remi, primary, Tillocher, Thomas, additional, Gosset, Nicolas, additional, Lefaucheux, Philippe, additional, L'jazouli, Rami, additional, Boufnichel, Mohamed, additional, Zhang, Liping, additional, de Marneffe, Jean-Francois, additional, Baklanov, Mikhail, additional, Nishimura, Eiichi, additional, Yatsuda, Koichi, additional, and Maekawa, Kaoru, additional
Published: 2014
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3. Low Damage Cryogenic Etching of Porous Organosilicate Low-k Materials Using SF6/O2/SiF4

Author: Zhang, Liping, primary, Ljazouli, Rami, additional, Lefaucheux, Philippe, additional, Tillocher, Thomas, additional, Dussart, Remi, additional, Mankelevich, Yuri A., additional, de Marneffe, Jean-Francois, additional, de Gendt, Stefan, additional, and Baklanov, Mikhail R., additional
Published: 2013
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