6 results on '"He, Yongyong"'
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2. Effect of Potassium Ions on Tantalum Chemical Mechanical Polishing in H2O2-Based Alkaline Slurries
3. Chemical Mechanical Polishing of Stainless Steel as Solar Cell Substrate
4. Effects of the Polishing Variables on the Wafer-Pad Interfacial Fluid Pressure in Chemical Mechanical Polishing of 12-Inch Wafer
5. In Situ Measurement of Fluid Pressure at the Wafer-Pad Interface during Chemical Mechanical Polishing of 12-inch Wafer
6. Modeling the Chemical-Mechanical Synergy during Copper CMP
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