Author: "Chen, Kuang-Chao" / Publisher: the electrochemical society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Chen, Kuang-Chao"' showing total 6 results

Start Over Author "Chen, Kuang-Chao" Publisher the electrochemical society

6 results on '"Chen, Kuang-Chao"'

1. Process Optimization of Contact Module in NOR Flash Using High Resolution e-Beam Inspection

Author: Liao, Hsiang C., primary, Hung, Che L., additional, Luoh, Tuung, additional, Yang, Ling-Wu, additional, Yang, Tahone, additional, Chen, Kuang-Chao, additional, and Lu, Chih-Yuan, additional
Published: 2019
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2. Verification of Systematic Defects Using e-Beam Defect Review System

Author: Luoh, Tuung, primary, Yang, Ling-Wu, additional, Yang, Tahone, additional, Chen, Kuang-Chao, additional, and Lu, Chih-Yuan, additional
Published: 2019
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3. Systematic Hot Spots Finding By Pattern Search with Similarity

Author: Luoh, Tuung, primary, Lv, Rong, additional, Chen, Chi-min, additional, Liao, Hsiang-Chou, additional, Yang, Ling-Wu, additional, Yang, Ta-hone, additional, Chen, Kuang-Chao, additional, and Lu, Chih-Yuan, additional
Published: 2014
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4. Etched Profile Control of the Multi-Layer Oxide/Poly-Si Stack Using Pulsed Plasma for 3D VG NAND Application

Author: Hsu, Fang Hao, primary, Yang, Zusing, additional, Lee, Hong Ji, additional, Lian, Nan Tzu, additional, Yang, Tahone, additional, Chen, Kuang Chao, additional, and Lu, Chih Yuan, additional
Published: 2013
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5. Process Variation Improvement and Stress Analysis of Contact Module

Author: Luoh, Tuung, primary, Liao, Hsiang-Chou, additional, Chen, Po-Chou, additional, Yang, Ling-Wu, additional, Yang, Tahone, additional, Chen, Kuang-Chao, additional, and Lu, Chih-Yuan, additional
Published: 2012
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6. Advanced Inspection Technique for High Aspect Ratio Contact Holes Using e Beam Scan and Voltage Cap in SEM Review

Author: Liao, Hsiang-Chou, primary, Hung, Che-Lun, additional, Luoh, Tuung, additional, Yang, Ling-Wu, additional, Yang, Tahone, additional, Chen, Kuang-Chao, additional, and Lu, Chih-Yuan, additional
Published: 2012
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