5 results on '"Bae, Choelhwyi"'
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2. Effect of Buffer Layer for HfO[sub 2] Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition
3. Effects of N[sub 2] RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO[sub 2] Films
4. Remote Plasma Atomic Layer Deposition of HfO[sub 2] Thin Films Using the Alkoxide Precursor Hf(mp)[sub 4]
5. Effects of Remote Plasma Pre-oxidation of Si Substrates on the Characteristics of ALD-Deposited HfO[sub 2] Gate Dielectrics
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