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(BaTiO 3 /SrTiO 3 ) 15 superlattices were grown by metal organicchemical vapor deposition (MOCVD) on <001> oriented LaAlO 3 and Nb-doped SrTiO 3 substrates. The source was a pulsed liquid-injection delivery system, with a unique precursors solution for each compound. The thickness of the layers was controlled by adjusting the amount of liquid injected. Different sets of samples were prepared with varying interlayer thickness. The satellite peaks observed on the X-ray diffraction patterns indicate a superlattice structure. High-angle diffraction using X-ray synchrotron radiation was used to assess the structural and chemical disorder and the interface state with respect to the ideal defect-free superlattice. Electrical measurements were performed on the multilayers, using the SrTiO 3 :Nb substrate as a bottom electrode. As the period of the (BaTiO 3 /SrTiO 3 ) 15 superlattices increases (and also the total thickness), the dielectric constant increases. It reaches a value of 620 for (BaTiO 3 36 u.c./SrTiO 3 36 u.c.) 15 . [ABSTRACT FROM AUTHOR]