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Responsible research and innovation (RRI) has recently emerged as a policy framework to align technological innovation with broader social values. It helps regions focus on their strengths and boost their innovation, growth, and prosperity through partnerships between business, public entities, and knowledge institutions. However, the study of RRI dynamics including whether and how attitudes, drivers, and behaviours at the individual, organizational, and network levels affect the impact of RRI, is in its infancy. Based on a survey of societal actors from three regional innovation ecosystems in Norway, Austria, and Spain, we examine the role of RRI in responsible regional planning. Our study advances our knowledge about regional innovation policies by providing evidence of how different stakeholders and policymakers engage in RRI when designing responsible regional planning. We identify the extent to which they incorporate RRI activities into their work practices, the extent to which their organizations and network support their practices and outcomes, and the effects they have observed. Our study also considers the factors that promote or impede RRI activities. The results are particularly relevant for policy makers interested in strengthening regional innovation policies and boosting regional growth via RRI. [ABSTRACT FROM AUTHOR]