1. Influence of Thermal Annealing Treatment on Bipolar Switching Properties of Vanadium Oxide Thin-Film Resistance Random-Access Memory Devices
- Author
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Feng-Yi Su, Ting-Chang Chang, Sean Wu, Chien-Min Cheng, Kuan-Chang Chang, Tsung-Ming Tsai, Ming-Cheng Kao, and Kai-Huang Chen
- Subjects
010302 applied physics ,Materials science ,business.industry ,Scanning electron microscope ,02 engineering and technology ,Activation energy ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Thermal conduction ,01 natural sciences ,Vanadium oxide ,Electronic, Optical and Magnetic Materials ,Resistive random-access memory ,Non-volatile memory ,X-ray photoelectron spectroscopy ,0103 physical sciences ,Materials Chemistry ,Optoelectronics ,Electrical and Electronic Engineering ,Thin film ,0210 nano-technology ,business - Abstract
The bipolar switching properties and electrical conduction mechanism of vanadium oxide thin-film resistive random-access memory (RRAM) devices obtained using a rapid thermal annealing (RTA) process have been investigated in high-resistive status/low-resistive status (HRS/LRS) and are discussed herein. In addition, the resistance switching properties and quality improvement of the vanadium oxide thin-film RRAM devices were measured by x-ray diffraction (XRD) analysis, x-ray photoelectron spectrometry (XPS), scanning electron microscopy (SEM), atomic force microscopy (AFM), and current–voltage (I–V) measurements. The activation energy of the hopping conduction mechanism in the devices was investigated based on Arrhenius plots in HRS and LRS. The hopping conduction distance and activation energy barrier were obtained as 12 nm and 45 meV, respectively. The thermal annealing process is recognized as a candidate method for fabrication of thin-film RRAM devices, being compatible with integrated circuit technology for nonvolatile memory devices.
- Published
- 2016
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