1. Simulation of the Silicon Sensitive Element of Capacitive Accelerometer Using the Analytical Model.
- Author
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Thu, Paing Soe, Kalugin, V. V., and Kochurina, E. S.
- Subjects
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CAPACITIVE sensors , *STRAINS & stresses (Mechanics) , *ACCELEROMETERS , *SILICON , *DEFORMATIONS (Mechanics) , *STRUCTURAL design , *CARBON nanofibers - Abstract
In this study, simulation of a silicon sensitive element (SE) of capacitive accelerometer using the analytical model to obtain the optimized sensitivity of the capacitive type accelerometer structure with comb-drives is presented. The objective of the article is to consider the design of the silicon SE, deformation results, mechanical stresses and capacitance changes between the gaps of comb-drives on the silicon SE of MEMS-based capacitive type accelerometer. At first, the structural design of the silicon SE of MEMS-based capacitive accelerometer structure with the sensitive comb-drives using the software of SOLIDWORKS is given. The deformation results and mechanical stresses of the SE of MEMS-based capacitive accelerometer along the working axes of X and Y, which play an essential role for calculation of capacitance changes between the comb-drives of the structure by using the ANSYS software are analyzed. The deformation results of the silicon SE at the temperature ranges from –40 to 80°С with an acceleration range of 300 g by using the program of ANSYS are considered. Capacitance changes between comb-drives based on the deformation results on the silicon SE of capacitive accelerometer with the membrane of 40 µm thickness when exposed to the structure of the SE with the acceleration ranges from 50 to 300 g by using the program of Ansys Maxwell are studied. To enhance the sensitivity of the capacitive comb type accelerometer, the presented design is more appropriate for manufacturing of sensitive devices in the field of MEMS sensors. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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