1. Optimal Growth Conditions for Selective Ge Islands Positioning on Pit-Patterned Si(001)
- Author
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Leo Miglio, Francesco Montalenti, Roberto Bergamaschini, Bergamaschini, R, Montalenti, F, and Miglio, L
- Subjects
Ostwald ripening ,Materials science ,Ge ,Nucleation ,Flux ,Nanochemistry ,Nanotechnology ,pattern ,Thermal diffusivity ,symbols.namesake ,Materials Science(all) ,lcsh:TA401-492 ,General Materials Science ,Kinetic Monte Carlo ,Chemistry/Food Science, general ,FIS/03 - FISICA DELLA MATERIA ,Material Science ,Engineering, General ,Homogeneity (statistics) ,Special Issue Article ,Materials Science, general ,Stranski-Krastanow growth ,Condensed Matter Physics ,heteroepitaxy ,Patterning ,Physics, General ,8th International Workshop on Epitaxial Semiconductors on Patterned Substrates and Novel Index Surfaces ,Chemical physics ,symbols ,Molecular Medicine ,lcsh:Materials of engineering and construction. Mechanics of materials ,Si ,Optimal growth - Abstract
We investigate ordered nucleation of Ge islands on pit-patterned Si(001) using an original hybrid Kinetic Monte Carlo model. The method allows us to explore long time-scale evolution while using large simulation cells. We analyze the possibility to achieve selective nucleation and island homogeneity as a function of the various parameters (flux, temperature, pit period) able to influence the growth process. The presence of an optimal condition where the atomic diffusivity is sufficient to guarantee nucleation only within pits, but not so large to induce significant Ostwald ripening, is clearly demonstrated.
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