1. Optical Properties of TiO Films Deposited by Reactive Electron Beam Sputtering.
- Author
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Kruchinin, V., Perevalov, T., Atuchin, V., Gritsenko, V., Komonov, A., Korolkov, I., Pokrovsky, L., Shih, Cheng, and Chin, Albert
- Subjects
ELECTRON beams ,ELLIPSOMETRY ,TITANIUM oxides ,OPTICAL constants ,SPUTTERING (Physics) ,ATOMIC force microscopy ,X-ray diffraction - Abstract
Titanium dioxide (anatase, a-TiO) films have been prepared by electron beam sputtering of a TiO target in reactive atmosphere and their structural, microstructural, and optical properties were evaluated by reflection high- energy electron diffraction (RHEED) and x-ray diffraction (XRD) analyses, atomic force microscopy (AFM), and spectroscopic ellipsometry (SE). Different reflection models for determination of film optical parameters were tested and compared. The dispersive optical parameters were defined using the Tauc-Lorentz model by SE in the photon energy range of E = 1.12-4.96 eV. The films were transparent at E < 3 eV, but noticeable absorption was detected at E > 3 eV. The bandgap was estimated at the level of E ≈ 3.44 eV. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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