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Abstract  Lead zirconate titanate (PZT) is a piezoelectric material that can sense or respond to mechanical deformations and can be used in ceramic micro-electro-mechanical systems (C-MEMS). A thick-film paste was prepared from a pre-reacted PZT powder (PbZr0.53Ti0.47O3) and thick-film technology (screen-printing and firing) was used to deposit the PZT layers on LTCC tapes and on alumina substrates. The microstructural, electrical and piezoelectric characteristics of the thick PZT films on relatively inert alumina substrates and on LTCC tapes were studied. Preliminary experiments indicated that due to the interaction between the printed PZT layers and the LTCC substrates during firing the electrical characteristics deteriorate significantly. To minimise the influence of substrate-film interactions different electrode materials and the use of additional intermediate layers as a barrier were evaluated. The dielectric permittivities, dielectric losses, and piezoelectric coefficients (d 33) were measured. The dielectric permittivities of the thick films fired on LTCC substrates were lower (210 with gold electrodes and 430 with silver electrodes) than those measured on alumina substrates (500). The piezoelectric coefficients d33 were measured with a Berlincourt piezometer. The d 33 values measured on the LTCC substrates were relatively low (60–80 pC/N) compared with the values obtained for the alumina substrates (around 140 pC/N). The lower dielectric constants and piezoelectric coefficients d 33 of the films on LTCC substrates are attributed to the formation of phases with a lower permittivity. This was a result of the diffusion of SiO2 from the LTCC into the active PZT layer. The diffusion of silica was confirmed by the SEM and EDS analyses. [ABSTRACT FROM AUTHOR]

Abstract  Na0.5Bi0.5TiO3 (NBT) thin films were fabricated by a chemical solution deposition (CSD) method. A route involving the reaction between sodium and bismuth acetates and titanium n-butoxide was used to synthesise the different precursor solutions. The thermal decomposition and crystallization pathways of different modified precursors have been studied by thermal analysis and X-ray diffraction techniques. As a consequence of the modification of the precursor solutions and their different thermal behaviour, the nucleation of the stable perovskite phase happens at different temperatures depending on each case but is found to be at temperatures as low as 500 °C. For the thin film processing, the drying and pyrolysis temperatures were chosen according to the thermogravimetric data to minimize the strain resulting from the shrinkage of the film during the elimination of solvents and organic ligands. The crystallization process was studied and the experimental results are discussed in terms of structural, microstructural and electrical features investigated by field-emission scanning electron microscopy, atomic force microscopy in tapping and piezo-force modes and X-ray diffraction. [ABSTRACT FROM AUTHOR]

Abstract  The piezoelectric, microstructural and electrical characteristics of thick PZT films on relatively inert alumina substrates and on two LTCC tapes, i.e., Du Pont 951 and Electro Science Labs 41020 were studied. A thick-film paste was prepared from the pre-reacted PZT powder (PbZr0.53Ti0.47O3) and printed and fired on LTCC tapes and on alumina substrates, respectively. Dielectric permittivities, dielectric losses, remnant polarizations and coercive fields were measured. The dielectric constants (100–150) of thick films fired on LTCC substrates are low. The piezoelectric coefficients d 33 were measured by different methods, i.e. Berlincourt piezometer, interferometry and piezoresponse force microscope (PFM). The d 33 values on LTCC substrates are low (30–70 pm/V) as compared with values obtained on alumina substrates (around 120 pm/V). Lower dielectric constants and piezoelectric coefficients d 33 of films on LTCC substrates are attributed to the formation of phases with a low permittivity due to the diffusion of silica from LTCC substrates into PZT films. The d 33 constants of samples with different thicknesses of PZT layers (from 20 to 160 μm) at first increase with the increasing thickness of PZT layers and then decrease for thicker films. As the cracks in the structure were not observed the reason for the decreasing d 33 values for thicker films is still unclear. [ABSTRACT FROM AUTHOR]

Abstract  Laminated 3D structures made using low-temperature co-fired ceramic (LTCC) technology are practical for ceramic micro-electro-mechanical systems (C-MEMS). The sensors for mechanical quantities, and/or actuators, are fundamental parts of MEMS. Thick-film resistors can be used to sense the mechanical deformations, and thick-film piezoelectric materials can be used as electro-mechanical transducers in a C-MEMS structure. The integration of these thick-film materials on LTCC substrates is in some cases difficult to realise due to interactions with the rather glassy LTCC substrates. The subject of our work is an investigation of thick-film materials for electro-mechanical transducers (sensors and actuators) and their compatibility with LTCC substrates. Resistors made with commercial thick-film resistor materials for use as sensors on LTCC substrates have been investigated and evaluated. Ferroelectric ceramic materials based on solid solutions of lead zirconate titanate (PZT) with low firing temperatures around 850°C were developed for thick-film technology and evaluated on LTCC substrates. [ABSTRACT FROM AUTHOR]

Abstract  Fine lanthanum zirconate powder was prepared by thermally decomposing a nitrate-alkoxide-based precursor derived from dehydrated lanthanum nitrate, zirconium n-butoxide and 2-methoxyethanol. Upon heating, the decomposition of the organic groups was promoted by the nitrate groups, yielding a porous powder that crystallized into a pyrochlore phase at 800 �C. The powder that was heat treated at 900 �C for 1 h was composed of friable agglomerates of approximately 60-nm-sized nanoparticles. The ceramics obtained from the powder heat treated at 900 �C and milled for 30 min reached a relative density of 97.9 % after sintering at 1,400 �C for 10 h, which is at least 100 �C lower than the typically reported temperatures for this material. [ABSTRACT FROM AUTHOR]