1. Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data.
- Author
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Kruchinin, V. N., Spesivtsev, E. V., Rykhlitsky, C. V., Gritsenko, V. A., Mehmood, F., Mikolajick, T., and Schroeder, U.
- Subjects
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OPTICAL properties , *RANDOM access memory , *ELLIPSOMETRY , *FLASH memory , *OXIDE coating - Abstract
Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films H-fxZryO2 and lanthanum-alloyed hafnia-zirconium oxide films La:HfxZryO2. Fluctuations of thickness in HfxZryO2 do not exceed 3.5%, fluctuations of thickness in La:HfxZryO2 films—3.2%. Optical properties are analyzed based on effective-medium theory. According to effective-medium theory data, HfxZryO2 films contain 46% HfO2, 54% ZrO2, La:HfxZryO2 films contain 47.5% HfO2, 52.4% ZrO2, 2.5% La2O3. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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