1. Microstructure and Mechanical Properties of Ti–Al–Ta–N Coatings Obtained by High-Power Impulse Magnetron Sputtering.
- Author
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Kuzminov, E. D., Derbin, A. Y., and Shugurov, A. R.
- Subjects
- *
MAGNETRON sputtering , *DC sputtering , *SURFACE coatings , *SUBSTRATES (Materials science) , *SCANNING electron microscopy , *X-ray spectroscopy - Abstract
The composition, structure and mechanical properties of Ti–Al–Ta–N coatings obtained by high-power impulse magnetron sputtering and direct current magnetron sputtering have been studied using energy-dispersive X-ray spectroscopy, X-ray diffraction, scanning electron microscopy, and nanoindentation. It has been established that for high-power impulse sputtering, the current and power of the magnetron discharge increase exponentially during the pulse and reach peak values that are an order of magnitude higher than similar characteristics for magnetron sputtering at direct current. A high level of ionization of the sputtered particles caused a significant increase in the number of ions in the particle flux deposited on the substrate. The suppression of the growth of columnar grains and the formation of a denser and more homogeneous microstructure were ensured by an increase in the intensity of ion bombardment of the growing coating. This made it possible to improve its mechanical characteristics. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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