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The impurity composition of natural and isotopically enriched silane obtained from magnesium silicide and silicon tetrafluoride is studied by gas chromatography–mass-spectrometry. The impurities characteristic of silane with natural and isotopically enriched composition are atmospheric gases; carbon dioxide; hydrides; saturated, unsaturated, and aromatic hydrocarbons; halogenated hydrocarbons; alkyl derivatives and silane homologues, siloxanes. The impurity content of high-purity silane does not exceed 10–7–10–5 mol % After synthesis, the concentrations of impurities in the silane and fractions isolated by its distillation purification lie in the range n × 10–6 − n × 10 mol % The limits of detection for impurities are 1 × 10–8–9 × 10–4 mol % [ABSTRACT FROM AUTHOR]

A method of chromatography–mass spectrometry is used to study the impurity composition of arsine synthesized by the reaction of arsenic chloride with sodium borohydride. Capillary adsorption columns with adsorbents modified silica and polytrimethylsilylpropine is used for the separation of impurities. Impurities are identified by comparing their mass spectra with the NIST database, published data, as well as by reconstructing their structures from fragment ions. Impurities of permanent gases; saturated and unsaturated hydrocarbons C1–C6; chlorinated, oxygenated, and aromatic hydrocarbons; volatile inorganic hydrides; and alkyl derivatives of arsine, trimethyl fluorosilane, carbon sulfur dioxide, and dimethyl sulfide are identified in arsine. Mass spectra of C2H3AsH2, CH3AsHC2H5, and C2H5As2H3 impurities are obtained for the first time. [ABSTRACT FROM AUTHOR]