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Your search keyword '"Vivek Bakshi"' showing total 3 results
Start Over Author "Vivek Bakshi" Publisher spie-intl soc optical eng
3 results on '"Vivek Bakshi"'

2. Special Section Guest Editorial: EUV Sources for Lithography

Author

Anthony Yen and Vivek Bakshi

Subjects
Materials science, business.industry, Semiconductor device fabrication, Mechanical Engineering, Extreme ultraviolet lithography, Integrated circuit, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Metrology, law, Extreme ultraviolet, Special section, Optoelectronics, Electrical and Electronic Engineering, Photolithography, business, Lithography
Published
2012
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3. Modeling and optimization of debris mitigation systems for laser and discharge-produced plasma in extreme ultraviolet lithography devices

Author

Vivek Bakshi, Ahmed Hassanein, and Valeryi Sizyuk

Subjects
Physics, Jet (fluid), business.industry, Mechanical Engineering, Extreme ultraviolet lithography, Plasma, Condensed Matter Physics, Debris, Atomic and Molecular Physics, and Optics, Charged particle, Electronic, Optical and Magnetic Materials, Optics, Extreme ultraviolet, Physics::Space Physics, Astrophysics::Solar and Stellar Astrophysics, Astrophysics::Earth and Planetary Astrophysics, Electrical and Electronic Engineering, Current (fluid), business, Lithography
Abstract

Physical models are developed to investigate the following conditions relevant to discharge-produced plasma (DPP) devices under development for extreme ultraviolet (EUV) lithography: gaseous jet propagation in the chamber, removal of neutral particles with a gaseous jet, and deviation of charged particles with a magnetic field. Several geometries of the mitigation systems are considered for removing debris during the EUV lithographic process. The design of a mitigation system is proposed and simulated with the computer models. The behavior of Xe, Li, and Sn debris in Ar and He jets is simulated by using the high energy interaction with general heterogeneous target systems (HEIGHTS) integrated package. Final energy and local distributions are calculated using experimental debris data from current EUV facilities.

Published
2007
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