1. Calcium barium niobate ridge waveguide on silicon substrate.
- Author
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Mortazy, Ebrahim, Stateikina, Irina, Tehranchi, Amirhossein, Delprat, Se´bastien, Chaker, Mohamed, and Wu, Ke
- Subjects
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NIOBATES , *WAVEGUIDES , *SILICON , *OPTICAL instrument design & construction , *LIGHT modulators , *SIMULATION methods & models , *PULSED laser deposition , *OPTICAL engineering - Abstract
A novel optical ridge waveguide using calcium barium niobate (CBN) with a high electro-optic coefficient on silicon substrate is proposed for the design and realization of the next-generation hybrid modulators with short length and low driving voltage. To overcome the etching difficulty of CBN, the design of a waveguide, including an elevated CBN layer based on etched silicon dioxide, is presented. Fabrication of a thick 2.5-mCBN layer is performed using pulsed laser deposition. Deposited silicon dioxide on the sides and top of the CBN reduces the waveguide loss as low as 3.44 dBcm, measured using a cutback method. Good agreement between the mode profiles of the simulation and measurement is obtained. [ABSTRACT FROM AUTHOR]
- Published
- 2010