5 results on '"Zelsmann, M."'
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2. Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes
3. Nanoimprint-assisted directed self-assembly of low-molecular weight block copolymers: a route for 3D and multilevel nanostructures
4. Template flatness issue for UV curing nanoimprint lithography
5. Evaluation of an alternative UV-NIL mold fabrication process
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