Author: "Yu, Hao-Yun" / Publisher: spie - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Yu, Hao-Yun"' showing total 2 results

Start Over Author "Yu, Hao-Yun" Publisher spie

2 results on '"Yu, Hao-Yun"'

1. Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts

Author: Yang, Yi-Yeh, additional, Lee, Hsuan-Ping, additional, Liu, Chun-Hung, additional, Yu, Hao-Yun, additional, Tsai, Kuen-Yu, additional, and Li, Jia-Han, additional
Published: 2014
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2. Improvement in electron-beam lithography throughput by exploiting relaxed patterning fidelity requirements with directed self-assembly

Author: Yu, Hao Yun, additional, Liu, Chun-Hung, additional, Shen, Yu Tian, additional, Lee, Hsuan-Ping, additional, and Tsai, Kuen Yu, additional
Published: 2014
Full Text: View/download PDF

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